{"id":21657,"date":"2022-06-15T13:47:42","date_gmt":"2022-06-15T06:47:42","guid":{"rendered":"https:\/\/www.nectec.or.th\/en\/?p=21657"},"modified":"2022-07-12T12:02:26","modified_gmt":"2022-07-12T05:02:26","slug":"tmec-sifrt","status":"publish","type":"post","link":"https:\/\/www.nectec.or.th\/en\/research\/tmec\/tmec-sifrt.html","title":{"rendered":"Silicon Industrial Fabrication Research Team (SIFRT)"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"21657\" class=\"elementor elementor-21657\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-b461361 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"b461361\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a131202\" data-id=\"a131202\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-afa53a0 elementor-widget elementor-widget-text-editor\" data-id=\"afa53a0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Silicon Industrial Fabrication Research team (SIFRT) is a team under Thai Microelectronics Center (TMEC), Our research team has developed both local and international research collaboration and connections with research units, academics, institutions and etc. For example, a joint research project to develop a silicon microchannel heat exchanger between TMEC-ALICE\/CERN, a customization fabrication process and services of silicon mold for private companies and etc. SIFRT consists of 3 research groups as follows:<\/p><ol><li aria-level=\"1\">Silicon Process Technology Team (SPT): A research group with knowledge, skills, expertise in CMOS-MEMS microfabrication technologies including hand-on experiences in operating various machines and tools in the cleanroom.<\/li><li aria-level=\"1\">ISFET Team (IST): A research group with knowledge, skills, expertise in Ion sensitive field effect transistor (or ISFET) technology that is used as a platform for developing chemical sensors and biosensors.<\/li><li aria-level=\"1\">MEMS Team: A Research groups with knowledge, skills, and expertise in design, simulation modeling and fabrication of various micro-devices and micro-structures using CMOS-MEMS fabrication technologies This also includes post-fabrication process such as assembly, packaging, electrical properties and functional testing, product reliability and qualification of sensors and MEMS from concept to prototype to commercial products.<\/li><\/ol>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-7a3f464\" data-id=\"7a3f464\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-94783a2 elementor-toc--content-ellipsis elementor-toc--minimized-on-tablet elementor-widget elementor-widget-table-of-contents\" data-id=\"94783a2\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;headings_by_tags&quot;:[&quot;h3&quot;],&quot;exclude_headings_by_selector&quot;:[],&quot;marker_view&quot;:&quot;bullets&quot;,&quot;icon&quot;:{&quot;value&quot;:&quot;fas fa-circle&quot;,&quot;library&quot;:&quot;fa-solid&quot;},&quot;no_headings_message&quot;:&quot;No headings were found on this page.&quot;,&quot;minimize_box&quot;:&quot;yes&quot;,&quot;minimized_on&quot;:&quot;tablet&quot;,&quot;hierarchical_view&quot;:&quot;yes&quot;,&quot;min_height&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"table-of-contents.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-toc__header\">\n\t\t\t\t\t\t<h4 class=\"elementor-toc__header-title\">\n\t\t\t\t\u0e2a\u0e32\u0e23\u0e1a\u0e31\u0e0d\t\t\t<\/h4>\n\t\t\t\t\t\t\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--expand\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__94783a2\" aria-expanded=\"true\" aria-label=\"Open table of contents\"><i aria-hidden=\"true\" class=\"fas fa-chevron-down\"><\/i><\/div>\n\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--collapse\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__94783a2\" aria-expanded=\"true\" aria-label=\"Close table of contents\"><i aria-hidden=\"true\" class=\"fas fa-chevron-up\"><\/i><\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<div id=\"elementor-toc__94783a2\" class=\"elementor-toc__body\">\n\t\t\t<div class=\"elementor-toc__spinner-container\">\n\t\t\t\t<i class=\"elementor-toc__spinner eicon-animation-spin eicon-loading\" aria-hidden=\"true\"><\/i>\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cc2c8be elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cc2c8be\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-1a728f0\" data-id=\"1a728f0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a3d0ffb elementor-widget elementor-widget-heading\" data-id=\"a3d0ffb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">Vision\u00a0<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3c55a55 elementor-widget elementor-widget-text-editor\" data-id=\"3c55a55\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"font-weight: 400;\">To promote and support the study, research and development, technology transfer and applications related to Si CMOS-MEMS fabrication technologies of various sensors and MEMS devices including other microdevices and microstructures that pave the way to development of new technologies and innovations in the future. Aiming towards the ultimate goal is to create a concrete upstream microelectronics industry in Thailand, and to demonstrate competitive advantages.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-db214be elementor-widget elementor-widget-image\" data-id=\"db214be\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"700\" height=\"350\" src=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT01.png\" class=\"attachment-large size-large wp-image-21661\" alt=\"\" srcset=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT01.png 700w, https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT01-300x150.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-768994a elementor-widget elementor-widget-image\" data-id=\"768994a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"700\" height=\"518\" src=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT02.png\" class=\"attachment-large size-large wp-image-21662\" alt=\"\" srcset=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT02.png 700w, https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT02-300x222.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-384ec7b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"384ec7b\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a45e848\" data-id=\"a45e848\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-89353a2 elementor-widget elementor-widget-heading\" data-id=\"89353a2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">Mission<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e2fdd19 elementor-widget elementor-widget-text-editor\" data-id=\"e2fdd19\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Research and development of both optimal and advanced sensors, MEMS, microdevices, and microstructures onto silicon substrates using CMOS-MEMS fabrication technologies<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Research and development of Ion sensitive field-effect transistor (or ISFET) technology as a platform of chemical sensors and biosensors<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Enabling the ecosystem of advanced sensors and MEMS production in Thailand<\/span><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3c5c5af elementor-widget elementor-widget-image\" data-id=\"3c5c5af\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"700\" height=\"514\" src=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT03.png\" class=\"attachment-large size-large wp-image-21663\" alt=\"\" srcset=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT03.png 700w, https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT03-300x220.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2479951 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"2479951\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b731f1f\" data-id=\"b731f1f\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4acfb5b elementor-widget elementor-widget-heading\" data-id=\"4acfb5b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">Core Technology<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7f99c72 elementor-widget elementor-widget-text-editor\" data-id=\"7f99c72\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">CMOS-MEMS fabrication technologies for sensors, MEMS, microdevices and microstructures onto silicon substrates<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">ISFET or Ion sensitive field technology transistor is a platform for developing chemical sensor and biosensors, with ISFET surface modification that are specific to the substances needed to measure on the silicon nitride layer which is an ISFET gate dielectric. For example, development of ISFET-based sensors comprises of nitrate sensor, DNAA sensor, DNA biosensor and TB sensor.<\/span><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-66f6a30 elementor-widget elementor-widget-image\" data-id=\"66f6a30\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"700\" height=\"248\" src=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT04.png\" class=\"attachment-large size-large wp-image-21666\" alt=\"\" srcset=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT04.png 700w, https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT04-300x106.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-381aff5 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"381aff5\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-5f34dd8\" data-id=\"5f34dd8\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2774208 elementor-widget elementor-widget-heading\" data-id=\"2774208\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">Renown Project\n<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6533da3 elementor-widget elementor-widget-text-editor\" data-id=\"6533da3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Development of photonic array biosensor technology and ISFET-based sensors for detection of fungal toxins [2019-present]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">The prototype &#8220;Handheld Real time ISFET based nitrate&#8221; has been awarded the Silver Medal Award from 2017 Taipei International Invention Show &amp; Technomart Invention Contest, which is held at Taipei World Trade Center between 28-30 September 2560 in Taipei, Taiwan<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">A silicon nitride ISFET based immunosensor for Ag85B detection of tuberculosis [2016]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Non-enzymatic urea sensor using molecularly imprinted polymers surface modified based-on ion-sensitive field effect transistor (ISFET) [2016]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Prototype development of durable nitrate sensor by surface modification [2016-present]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Development of an immunoFET biosensor for the detection of biotinylated PCR Product [2016-present]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Prototype development of piezoresistive pressure sensors using the integrated CMOS-MEMS microfabrication on the silicon sub-state. The pressure rage is 0-30 bar enabling them to be potentially applied in different areas such as in agriculture, industrial, medical etc., and higher pressure range up to 50 bar for specific application in the near future. [2014-present]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Developed the manufacturing process of the probe for use with the pressure wire in the heart of the product, RADI Medical Systems AB, Sweden (currently merged with Saint Jude Medical in the United States) to assist in the measurement of blood pressure for patients with coronary artery disease. By developing commercial prototypes of blood pressure sensor was 120,000 dies (the 1st generation) to 400,000 dies (the 5th generation) [2004-2013]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Development of fabrication process for the first generation Si MEMS microphone having a diaphragm that detects sound pressures (acoustic waves), made of an epitaxially grown silicon. In the second generation, a diaphragm is constructed from a thin-film polysilicon [2015-present]<\/span><\/li><li style=\"font-weight: 400;\" aria-level=\"1\"><span style=\"font-weight: 400;\">Development of fabrication process for the first generation of high-precision MEMS gyroscope prototype. [2019\u2013present, in a process of developing a proposal with the start-up company]<\/span><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cc59707 elementor-widget elementor-widget-image\" data-id=\"cc59707\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"700\" height=\"394\" src=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT05.png\" class=\"attachment-large size-large wp-image-21664\" alt=\"\" srcset=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT05.png 700w, https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT05-300x169.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35e5ea9 elementor-widget elementor-widget-image\" data-id=\"35e5ea9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"700\" height=\"516\" src=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT06.png\" class=\"attachment-large size-large wp-image-21665\" alt=\"\" srcset=\"https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT06.png 700w, https:\/\/www.nectec.or.th\/en\/wp-content\/uploads\/2022\/06\/SIFRT06-300x221.png 300w\" sizes=\"(max-width: 700px) 100vw, 700px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-90467f5 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"90467f5\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-bf6602e\" data-id=\"bf6602e\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-42814ad elementor-widget elementor-widget-heading\" data-id=\"42814ad\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">Members &amp; Expertise\n<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-57f8795 elementor-widget elementor-widget-text-editor\" data-id=\"57f8795\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p dir=\"ltr\" style=\"line-height: 1.2; margin-top: 0pt; margin-bottom: 0pt;\"><span style=\"font-size: 12pt; font-family: Arial; font-weight: bold; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">I. Silicon Process Technology Team (SPT)<\/span><\/p><ul><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Jakrapong Supadech (Leader) : MEMS microphone, pressure sensor gyroscope, CMOS-MEMS process integration, plasma etching (RIE, ICP &amp; Si DRIE)<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Nimit Somwang : Ion-implantation, wet chemical etching<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Miss Rattanawan Meananeatra : Photolithography, mask design, layout and tape-out<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Arckom Srihapat : Plasma enhanced chemical vapor deposition (PECVD), 3D-printing design and modeling<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Aekchai Chummano : Wet chemical etching, wafer cleaning<\/span><\/li><\/ul><p dir=\"ltr\" style=\"line-height: 1.2; margin-top: 0pt; margin-bottom: 0pt;\"><span style=\"font-size: 12pt; font-family: Arial; font-weight: bold; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">II. ISFET Team (IST)<\/span><\/p><ul><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Win Bunjongpru (Leader) : ISFET platform for chemical and biological applications, CMOS-MEMS process Integration, sputtering<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Woraphan Chaisriratanakul : Polymer sensing membrane technologies<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Awirut Srisuwan : Planar solid state reference electrode, plasma etching (RIE)<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Apirak Pankiew : Quality control of ISFET devices, Photolithography and wet chemical etching<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Nutthaphat Thornyanadacha : Advanced integrated circuits (ICs), sensors and MEMS packaging technologies<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Somkiad kaewno : Sputtering<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Miss Panyasiri tadaworawit : Plasma etching (RIE)<\/span><\/li><\/ul><p dir=\"ltr\" style=\"line-height: 1.2; margin-top: 0pt; margin-bottom: 0pt;\"><span style=\"font-size: 12pt; font-family: Arial; font-weight: bold; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">III. MEMS Team (MEMST)<\/span><\/p><ul><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Miss Hwanjit Rattanasonti (Leader) : MEMS microphone, pressure sensor, gyroscope, micro-energy harvesting devices (e.g., thermal, vibration), microfabrication ion traps, CMOS-MEMS fabrication process, device characterization and failure analysis<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Putapon Pengpad : A CMOS-MEMS humidity sensor integrated with micro heater, a graphene-based humidity sensor for linearity improvement of sensing curves, MEMS pressure sensors, rapid thermal processing (RTP)<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Karoon Saejok : MEMS pressure sensor, Ion-implantation<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Ekalak Chaowicharat : MEMS microphone, pressure sensor, gyroscope, accelerometer, CMOS-MEMS fabrication process<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Chana Leepattarapongpan : MEMS microphone, pressure sensor, magnetic sensor, wet\/dry oxidation and thin-film deposition<\/span><\/li><li dir=\"ltr\" style=\"line-height: 1.2;\" role=\"presentation\"><span style=\"font-size: 12pt; font-variant-east-asian: normal; vertical-align: baseline; white-space: pre-wrap;\">Mr. Watcharapong Paosangthong : Photolithography, energy harvesting technology (*on study abroad)<\/span><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f770f1b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f770f1b\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-26ca2f0\" data-id=\"26ca2f0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2433f1e elementor-widget elementor-widget-heading\" data-id=\"2433f1e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">Contact\n<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-685f70d elementor-widget elementor-widget-text-editor\" data-id=\"685f70d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"padding-left: 40px;\"><strong>Thai Microelectronics Center (TMEC)<\/strong><br \/>51\/4 Moo 1 Suwintawong Road, Wangtakien,<br \/>Muang, Chachoengsao 24000, THAILAND<br \/>Tel: +66 (0)38-857-100 ext. 0<br \/>Fax: +66 (0)38-857-175<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Research and development of Si CMOS-MEMS fabrication technologies of various sensors and MEMS devices<\/p>\n","protected":false},"author":3,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[248],"tags":[523,477],"class_list":["post-21657","post","type-post","status-publish","format-standard","hentry","category-tmec","tag-research-team","tag-tmec"],"_links":{"self":[{"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/posts\/21657","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/comments?post=21657"}],"version-history":[{"count":8,"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/posts\/21657\/revisions"}],"predecessor-version":[{"id":21673,"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/posts\/21657\/revisions\/21673"}],"wp:attachment":[{"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/media?parent=21657"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/categories?post=21657"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.nectec.or.th\/en\/wp-json\/wp\/v2\/tags?post=21657"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}